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Call Number
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TK7875 Ger
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Title
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Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
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Uniform Title
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Einführung in die Mikrosystemtechnik. English
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Availability
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All items
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TP Library
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Series
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Wiley microsystem and nanotechnology series
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Author
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 Gerlach, Gerald.
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Add. Author
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Dötzel, Wolfram.
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Publisher
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Chichester, West Sussex ; Hoboken, N.J. : John Wiley & Sons, c2008.
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Description
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xxiii, 351 p. : ill. ; 26 cm.
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Notes
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Includes bibliographical references and index.
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Language Notes
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Translated from the German.
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Subject Heading
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Microelectromechanical systems -- Design and construction.
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System design.
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Microelectronics.
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ISBN
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9780470058619 (cloth)
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0470058617 (cloth)
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Record ID
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000226712
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