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| Call Number | TK7874 Hsu |
| Title | MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu. |
| Edition | 2nd ed. |
| Availability | All items |
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TP Library |
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| Publisher | Hoboken, N.J. : John Wiley & Sons, c2008. |
| Description | xxv, 550 p. : ill. ; 25 cm. |
| Notes | Includes bibliographical references (p. 509-521) and index. |
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| ISBN | 9780470083017 (cloth) |
| 0470083018 (cloth) | |
| Record ID | 000217928 |
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