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Call Number
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TK7874 Hsu
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Title
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MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.
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Edition
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2nd ed.
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Availability
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All items
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TP Library
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Author
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 Hsu, Tai-Ran.
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Publisher
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Hoboken, N.J. : John Wiley & Sons, c2008.
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Description
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xxv, 550 p. : ill. ; 25 cm.
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Notes
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Includes bibliographical references (p. 509-521) and index.
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Subject Heading
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Microelectronics.
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Microelectromechanical systems.
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Microelectronic packaging.
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ISBN
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9780470083017 (cloth)
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0470083018 (cloth)
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Record ID
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000217928
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| Table of Contents (SynPlus) |
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| Title / Fiction Profile (SynPlus) |
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